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  SiC Products / PRIME GRADE 2 INCH (50.8 mm) DIAMETER

SILICON CARBIDE (SiC) SUBSTRATE
2 INCH (50.8 mm) DIAMETER
- Prime Grade

 

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SILICON CARBIDE (SiC) SUBSTRATE SPECIFICATION

2 INCH (50.8 mm) DIAMETER,  6H POLYTYPE, ON-AXIS ORIENTATION.
PRIME GRADE

Property Value Tolerance Units
Diameter 50.80 +_0.20 mm
Edge Exclusion 2   mm
Center Thickness 400 µm or Customer Specification +_30 µm
Polytype 6H polytype >95% of area  
Micropipe Density
n-Type
Semi-Insulating
<100
<100
  cm-2
cm-2
Face Orientation c-plane(001); on-axis +_0.5 deg
Front Surface(Si-face); Fishsh(1) Epiready™    
Scraches by Bright Light Cumulative Length < 5cm    
Back Surface(C-face) Finish Customer Specified
Fine Ground Standard
   
Bow <25   µm
Primary Flat Orientation Prependicular to(11-20)plane +_1 deg
Secondary Flat Orientation 90° CW from primary flat +_5 deg
Carbon Face Laser Mark
Location & Text
Per customer specification    
Edge Beveled    
Packaging Single wafer Fluoroware™ container    
Cracks None    
Cumulative Area Defects <10% Area    
Dopant n-type Nitrogen
SI Vanadium Doped
   
  [1] Epiready™ polish is suitable for GaN epitaxial growth

PURCHASING INFORMATION

Purchase orders: Orders may be placed by e-mail, mail or fax.

Quotations: All quotations written or oral are valid for 60 days from the date of quotation.

Specifications: When placing orders or requests for quotations, please supply substrate specifications including diameter, thickness, orientation, flats, resistivity, dopant and concentration.

Warranty: WBG guarantees that all semiconductor material meets specifications provided. The buyer should notify WBG of any defects or nonconformance within 90 days after receipt of material.

Prices: The price and delivery on standard and custom requirements are available through WBG’s Sales Representatives.

Shipping: Federal Express, UPS, (Regular and Blue label), and air freight carriers are available. Fed Ex priority will be used unless otherwise instructed by buyer.

Terms: Payment terms are Net 30 days, FOB Pine Brook, NJ 07058.

 
           
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